Drum Shaker
Equipment for prevention of sedimentation of slurry inside drum for maintenance of the quality of slurry supplied to the CMP procedure
Key features
•Capacity : 1 Drum
•Prevention of Human Error : Barcode Reader
Interlock (Top clamp, Front clamp, Door interlock, Leak Sensor)
•Controller : Touch Screen
•Operation : 360° Vertical Rotation
•Features : Rotation speed and timer settings
Empty Mode
Alarm & History check
Align with Clamp adjustments according to Drum Size
Drum Shaker Auto Cart can be custom-made